In modern computing, the Boolean logic operations are set by interconnect schemes between the transistors. As the miniaturization in the component level to enhance the computational power is rapidly approaching physical limits, alternative computing methods are vigorously pursued. One of the desired aspects in the future computing approaches is the provision for hardware reconfigurability at ru...

We have developed a new microelectromechanical logic device using the MEMS (Micro Electro Mechanical Systems) technology. This device consists simply of a single cantilever and two driving electrodes with two contact pads for electrostatic operation. Both exclusive NOR (XNOR) and exclusive OR (XOR) logic devices have been realized using this simple construction.

The resonant frequencies of released microcantilevers, microbeams, and microplates are among the most important response characteristics for microelectromechanical systems such as resonators, sensors, and radio frequency (RF) switches. It is generally believed that the resonance frequencies of such structures decrease monotonically as the surrounding gas pressure is increased from vacuum condit...

The Casimir force is the attraction between uncharged metallic surfaces as a result of quantum mechanical vacuum fluctuations of the electromagnetic field. We demonstrate the Casimir effect in microelectromechanical systems using a micromachined torsional device. Attraction between a polysilicon plate and a spherical metallic surface results in a torque that rotates the plate about two thin tor...

Figure 1: Photographs showing (A) top and bottom of the silicon microchip, and (B) a packaged device with wire-bonded connector We have developed an implantable silicon microelectromechanical system (MEMS) device for biomedical applications [1]. This device contains an array of wells that hermetically store its contents. Activation of the device electrochemically dissolves gold membranes coveri...